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IC Chips / Electronics

Covering lithography systems for producing semiconductors and high-definition FPDs, as well as measuring systems for a variety of electronic components. Also includes various optical glass and optical materials.

Device Production
FPD Lithography Systems
FPD Lithography Systems

For producing panels employed by large-sized TVs and high-definition smart devices

Device Production
Semiconductor Lithography Systems
Semiconductor Lithography Systems

For producing semiconductors employed by cutting-edge processors/memories

Device Production
MEMS Steppers (Lithography Systems)
MEMS Steppers (Lithography Systems)

For producing MEMS, LEDs, and more

Measurement / Inspection / Analysis
Alignment Station 'Litho Booster'
Alignment Station "Litho Booster"

Realizes high-speed, highly accurate wafer measurement for greatly improved lithography accuracy

Measurement / Inspection / Analysis
Measuring Instruments
Measuring Instruments

For measuring sizes/shapes of precision parts

Measurement / Inspection / Analysis
CNC Video Measuring Systems
CNC Video Measuring Systems

Automated video measurement of sizes/shapes of precision parts

Measurement / Inspection / Analysis
光干渉顕微鏡システム
White Light Interferometric Microscope Systems

Accurate sub-nano-surface profiler with non-contact measurement

Measurement / Inspection / Analysis
3D Metrology Systems
3D Metrology Systems

For non-contact, highly accurate, 3D measurement

Measurement / Inspection / Analysis
X-ray/CT Inspection Systems
X-ray/CT Inspection Systems

For measuring internal/external dimensions without disassembling the product

Measurement / Inspection / Analysis
Industrial Microscopes
Industrial Microscopes

Versatile observation with high optical performance

Measurement / Inspection / Analysis
Microscope Components
Microscope Components

Built-in components for image observation on production lines

Measurement / Inspection / Analysis
Semiconductor Inspection/Wafer Loaders
Semiconductor Inspection/Wafer Loaders

Automatic macro/exterior inspection of IC wafers

Measurement / Inspection / Analysis
Digital Micrometer System "Digimicro"
Digital Micrometer System "Digimicro"

Indication of thickness/differences of parts in units of 0.01μm

Parts / Units
Industrial Lenses
Industrial Lenses

Compatible with high-resolution, large line-sensor cameras

Parts / Units
Absolute Encoders
Absolute Encoders

Sensors capable of detecting absolute rotational displacement values

Parts / Units
Optical Glass
Optical Glass

Optical glass delivering high transparency and superior homogeneity

Parts / Units
Optical Components & Materials
Optical Components & Materials

Optical components (light source, projection lens, etc.) and materials (synthetic silica glass, calcium fluoride, etc.)

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